Fabrication of Superconducting Nb Airbridges in a 300 mm Pilot Line for Quantum Technologies

Wan, DannyDannyWanMongillo, MassimoMassimoMongilloCanvel, YannYannCanvelPerez Lozano, DanielDanielPerez LozanoTobback, BertBertTobbackIvanov, TsvetanTsvetanIvanovPacco, AntoineAntoinePaccoPiao, XiaoyuXiaoyuPiaoMassar, ShanaShanaMassarPotocnik, AntonAntonPotocnikDe Greve, KristiaanKristiaanDe Greve2025-06-052025-03-062025-06-052024979-8-3503-8518-22380-632XWOS:001411360600013https://imec-publications.be/handle/20.500.12860/45330Fabrication of Superconducting Nb Airbridges in a 300 mm Pilot Line for Quantum TechnologiesProceedings paper10.1109/IITC61274.2024.10732203979-8-3503-8517-5WOS:001411360600013