Combining UHV AFM and SEM for high resolution, repeatable and low noise scanning spreading resistance microscopy

Eyben, PierrePierreEybenChintala, Ravi ChandraRavi ChandraChintalaMannarino, ManuelManuelMannarinoNazir, AftabAftabNazirSchulze, AndreasAndreasSchulzeVandervorst, WilfriedWilfriedVandervorst2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22327Combining UHV AFM and SEM for high resolution, repeatable and low noise scanning spreading resistance microscopyOral presentation