Jovic, AleksandarAleksandarJovicPandraud, GregoryGregoryPandraudSanchez, NuriaNuriaSanchezSancho, JuanJuanSanchoZinoviev, KirillKirillZinovievRubio, Jose L.Jose L.RubioMargallo, EduardoEduardoMargalloSarro, Pasqualina M.Pasqualina M.Sarro2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28613Two novel MEMS actuator systems for self-aligned integrated 3D optical coherent tomography scannersProceedings paperhttps://ieeexplore.ieee.org/document/7863528/