The indent reflow sealing (IRS) technique - A method for the fabrication of sealed cavities for MEMS devices

Tilmans, HarrieHarrieTilmansVan De Peer, MyriamMyriamVan De PeerBeyne, EricEricBeyne2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4793The indent reflow sealing (IRS) technique - A method for the fabrication of sealed cavities for MEMS devicesJournal article