Quantitative three-dimensional carrier mapping in nanowire-based transistors using scanning spreading resistance microscopy

Schulze, AndreasAndreasSchulzeHantschel, ThomasThomasHantschelEyben, PierrePierreEybenVerhulst, AnneAnneVerhulstRooyackers, RitaRitaRooyackersVandooren, AnneAnneVandoorenVandervorst, WilfriedWilfriedVandervorst2021-10-212021-10-2120130304-3991https://imec-publications.be/handle/20.500.12860/23060Quantitative three-dimensional carrier mapping in nanowire-based transistors using scanning spreading resistance microscopyJournal articlehttp://www.sciencedirect.com/science/article/pii/S0304399112002653