Assessment of EUV resist performance for sub-22nm hp lines and 26nm hp contacts on NXE3100

Goethals, MiekeMiekeGoethalsVan Roey, FriedaFriedaVan RoeyHosokawa, KoheiKoheiHosokawaHoefnagels, RikRikHoefnagelsNiroomand, ArdavanArdavanNiroomandFoubert, PhilippePhilippeFoubert2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20731Assessment of EUV resist performance for sub-22nm hp lines and 26nm hp contacts on NXE3100Oral presentation