Waeterloos, JoostJoostWaeterloosMeynen, HermanHermanMeynenCoenegrachts, BartBartCoenegrachtsGao, TengTengGaoGrillaert, JoostJoostGrillaertVan den hove, LucLucVan den hove2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2301Integrating a hydrogen silsesquioxane spin-on dielectric in a quarter micron technologyProceedings paper