A new method for the determination of surface chemistry of structured surfaces at the microscale using RBS in a tomographic mode

Claessens, NielsNielsClaessensVandervorst, WilfriedWilfriedVandervorstMeersschaut, JohanJohanMeersschaut2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/34911A new method for the determination of surface chemistry of structured surfaces at the microscale using RBS in a tomographic modeOral presentation