Defect Assessment in AlN Nucleation Layers Grown on Silicon and Silicon-on-Insulator Substrates

Simoen, EddyEddySimoenZhang, WeihangWeihangZhangZhang, JiahanJiahanZhangClaeys, CorCorClaeysZhao, MingMingZhao2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34011Defect Assessment in AlN Nucleation Layers Grown on Silicon and Silicon-on-Insulator SubstratesProceedings paperhttps://ieeexplore.ieee.org/document/8755720