Comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctions

Petersen, D.H.D.H.PetersenLin, R.R.LinHansen, T.M.T.M.HansenRosseel, ErikErikRosseelVandervorst, WilfriedWilfriedVandervorstMarkvardsen, C.C.MarkvardsenKjaer, D.D.KjaerNielsen, P.F.P.F.Nielsen2021-10-172021-10-1720081071-1023https://imec-publications.be/handle/20.500.12860/14307Comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctionsJournal article