Ferchichi, AbdelkarimAbdelkarimFerchichiTravaly, YoussefYoussefTravalyBeyer, GeraldGeraldBeyerBaklanov, MikhaïlMikhaïlBaklanovVanstreels, KrisKrisVanstreels2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13722Evaluation of an advanced organic ultra-low-k materialMeeting abstract