The reduction of hydrogen peroxide at silicon surfaces in HF solutions

Teerlinck, IvoIvoTeerlinckGomes, W.W.GomesStrubbe, K.K.StrubbeMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3876The reduction of hydrogen peroxide at silicon surfaces in HF solutionsMeeting abstract