An in-situ resistance measurement to extract IMC resistivity and kinetic parameter of alternative metallurgies for 3D stacking

Hou, LinLinHouDerakhshandeh, JaberJaberDerakhshandehRadisic, AlexAlexRadisicHonore, MiaMiaHonoreDe Coster, JeroenJeroenDe CosterCherman, VladimirVladimirChermanBex, PieterPieterBexBeyer, GeraldGeraldBeyerBeyne, EricEricBeyneDe Wolf, IngridIngridDe WolfRebibis, Kenneth JuneKenneth JuneRebibis2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30907An in-situ resistance measurement to extract IMC resistivity and kinetic parameter of alternative metallurgies for 3D stackingProceedings paperhttps://ieeexplore.ieee.org/document/8546500