Rottenberg, XavierXavierRottenbergDe Wolf, IngridIngridDe WolfNauwelaers, BartBartNauwelaersDe Raedt, WalterWalterDe RaedtTilmans, HarrieHarrieTilmans2021-10-162021-10-162005-06https://imec-publications.be/handle/20.500.12860/11133Impact of the dielectric charging on the electrostatic actuation of deformable clamped-clamped beamsProceedings paper