Growth kinetics of germanium on (100) germanium by pyrolysis of germane

Bonzom, RenaudRenaudBonzomLeys, FrederikFrederikLeysLoo, RogerRogerLooDessein, KristofKristofDesseinVandervorst, WilfriedWilfriedVandervorstCaymax, MattyMattyCaymax2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10128Growth kinetics of germanium on (100) germanium by pyrolysis of germaneOral presentation