High precision micro-scale Hall effect characterization method using in-line micro four-point probes

Petersen, DirchDirchPetersenHansen, OlafOlafHansenClarysse, TrudoTrudoClarysseGoossens, JozefienJozefienGoossensRosseel, ErikErikRosseelVandervorst, WilfriedWilfriedVandervorstLin, RongRongLinNielsen, PeterPeterNielsen2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14308High precision micro-scale Hall effect characterization method using in-line micro four-point probesProceedings paper