A method to evaluate internal cavity pressure of sealed MEMS devices

De Coster, JeroenJeroenDe CosterJourdain, AnneAnneJourdainPuers, BobBobPuersTilmans, HarrieHarrieTilmans2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10291A method to evaluate internal cavity pressure of sealed MEMS devicesProceedings paper