Sangameswaran, SandeepSandeepSangameswaranDe Coster, JeroenJeroenDe CosterWitvrouw, AnnAnnWitvrouwGroeseneken, GuidoGuidoGroesenekenDe Wolf, IngridIngridDe Wolf2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17938Robustness levels of MEMS to electrostatic discharge (ESD) stress - guidelines for protectionOral presentation