Ernur, DidemDidemErnurTerzieva, ValentinaValentinaTerzievaSchuhmacher, JorgJorgSchuhmacherMaex, KarenKarenMaex2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8889Inhibition of galvanic corrosion of WNC barrier metal for reliable Cu CMPProceedings paper