A progress report on DSA of high-chi silicon containing block co-polymers

Willson, C. GrantC. GrantWillsonJanes, DustinDustinJanesIto, NatsukoNatsukoItoBlachut, GregoryGregoryBlachutSirard, StephenStephenSirardSomeya, YasunobuYasunobuSomeyaDoise, JanJanDoiseMizuochi, RyutaRyutaMizuochiLane, AustinAustinLaneVandenberghe, GeertGeertVandenbergheRincon Delgadillo, PaulinaPaulinaRincon DelgadilloYang, XiaoMinXiaoMinYangEllison, ChristopherChristopherEllison2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/32269A progress report on DSA of high-chi silicon containing block co-polymersProceedings paperhttps://doi.org/10.1117/12.2299966