In situ studies of Pd/Ge layers for ohmic contact on GaAs and InGaAs

Firrincieli, AndreaAndreaFirrincieliSimoen, EddyEddySimoenMeuris, MarcMarcMeurisClaeys, CorCorClaeysOpsomer, KarlKarlOpsomerDetavernier, C.C.DetavernierVan Meirhaeghe, R.L.R.L.Van Meirhaeghe2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15311In situ studies of Pd/Ge layers for ohmic contact on GaAs and InGaAsMeeting abstract