Isotropic Etches to Enable Forksheet FET Integration

Oniki, YusukeYusukeOnikiMertens, HansHansMertensPuttarame Gowda, PallaviPallaviPuttarame GowdaSebaai, FaridFaridSebaaiAltamirano Sanchez, EfrainEfrainAltamirano SanchezHolsteyns, FrankFrankHolsteynsHoriguchi, NaotoNaotoHoriguchi2022-02-102021-12-012022-02-102021n/ahttps://imec-publications.be/handle/20.500.12860/38515Isotropic Etches to Enable Forksheet FET IntegrationMeeting abstract