De Wolf, IngridIngridDe WolfDe Coster, JeroenJeroenDe CosterVarela Pedreira, OlallaOlallaVarela PedreiraHaspeslagh, LucLucHaspeslaghWitvrouw, AnnAnnWitvrouw2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13629Wafer level characterization and failure analysis of microsensorsMeeting abstract