Design improvements for an electret-based MEMS vibrational electrostatic energy harvester

Altena, GeertGeertAltenaRenaud, MichaelMichaelRenaudElfrink, ReneReneElfrinkGoedbloed, MartijnMartijnGoedbloedde Nooijer, ChristineChristinede Nooijervan Schaijk, RobRobvan Schaijk2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/21969Design improvements for an electret-based MEMS vibrational electrostatic energy harvesterProceedings paperhttp://iopscience.iop.org/1742-6596/476/1/012078