Power spectral density as template for modeling a metal-oxide nanocluster resist to obtain accurate resist roughness profiles

Severi, JorenJorenSeveriWelling, UlrichUlrichWellingDe Simone, DaniloDaniloDe SimoneDe Gendt, StefanStefanDe Gendt2023-01-172021-11-022023-01-1720211932-5150WOS:000670414000014https://imec-publications.be/handle/20.500.12860/37828Power spectral density as template for modeling a metal-oxide nanocluster resist to obtain accurate resist roughness profilesJournal article10.1117/1.JMM.20.2.024601WOS:000670414000014