Bauwens, PieterPieterBauwensCornelis, SanderSanderCornelisDoutreloigne, JanJanDoutreloigne2022-03-082022-03-0820210924-4247WOS:000663554400003https://imec-publications.be/handle/20.500.12860/39379A leakage compensated charge control driving circuit with sensor feedback for a comb drive actuatorJournal article review10.1016/j.sna.2021.112799WOS:000663554400003