CMOS area scaling and the need for high aspect ratio vias

Briggs, BasoeneBasoeneBriggsGuissi, SofianeSofianeGuissiWilson, ChrisChrisWilsonRyckaert, JulienJulienRyckaertPaolillo, SaraSaraPaolilloVandersmissen, KevinKevinVandersmissenVersluijs, JankoJankoVersluijsLorant, ChristopheChristopheLorantHeylen, NancyNancyHeylenBoemmels, JuergenJuergenBoemmelsTokei, ZsoltZsoltTokeiSherazi, YasserYasserSheraziWeckx, PieterPieterWeckxKljucar, LukaLukaKljucarvan der Veen, MarleenMarleenvan der VeenBoccardi, GuillaumeGuillaumeBoccardiDe Heyn, VincentVincentDe HeynGupta, AnshulAnshulGuptaErvin, JosephJosephErvinKamon, MattMattKamon2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30327CMOS area scaling and the need for high aspect ratio viasProceedings paper