Si/O superlattice growth: structural insights and epitaxial process optimization

Caymax, MattyMattyCaymaxJayachandran, SuseendranSuseendranJayachandranDelabie, AnneliesAnneliesDelabieHeyns, MarcMarcHeyns2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23613Si/O superlattice growth: structural insights and epitaxial process optimizationProceedings paper