Benedetti, AlessandroAlessandroBenedettiBender, HugoHugoBenderTorregiani, CristinaCristinaTorregiani2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11716On the splitting of high order Laue zone lines in CBED analysis of stress in siliconJournal article