A monolithic high-voltage driver circuit based on a Dickson charge pump for MEMS actuator applications

Peng, HuiHuiPengDe Pauw, HerbertHerbertDe PauwBauwens, PieterPieterBauwensDoutreloigne, JanJanDoutreloigne2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33767A monolithic high-voltage driver circuit based on a Dickson charge pump for MEMS actuator applicationsJournal article