Dipole-First Gate Stack as a Scalable and Thermal Budget Flexible Multi-Vt Solution for Nanosheet/CFET Devices

Arimura, HiroakiHiroakiArimuraRagnarsson, Lars-AkeLars-AkeRagnarssonOniki, YusukeYusukeOnikiFranco, JacopoJacopoFrancoVandooren, AnneAnneVandoorenBrus, StephanStephanBrusLeonhardt, A.A.LeonhardtSippola, P.P.SippolaIvanova, T.T.IvanovaVerni, G. AlessioG. AlessioVerniChang, R-JR-JChangXie, Q.Q.XieGivens, M.M.GivensMitard, JeromeJeromeMitardBiesemans, SergeSergeBiesemansDentoni Litta, EugenioEugenioDentoni LittaHoriguchi, NaotoNaotoHoriguchi2022-08-252022-07-092022-08-2520212380-9248WOS:000812325400033https://imec-publications.be/handle/20.500.12860/40080Dipole-First Gate Stack as a Scalable and Thermal Budget Flexible Multi-Vt Solution for Nanosheet/CFET DevicesProceedings paper10.1109/IEDM19574.2021.9720527978-1-6654-2572-8WOS:000812325400033