On the Rseries extraction techniques for sub-22nm CMOS Finfet and SiGe technologies

Pantisano, LuigiLuigiPantisanoZschaetzsch, GerdGerdZschaetzschHellings, GeertGeertHellingsKrom, RaymondRaymondKromLee, Si HyungSi HyungLeeRitzenthaler, RomainRomainRitzenthalerMitard, JeromeJeromeMitardEneman, GeertGeertEnemanRoussel, PhilippePhilippeRousselChiarella, ThomasThomasChiarellaRagnarsson, Lars-AkeLars-AkeRagnarssonTogo, MitsuhiroMitsuhiroTogoVandervorst, WilfriedWilfriedVandervorstGroeseneken, GuidoGuidoGroesenekenThean, AaronAaronTheanHoriguchi, NaotoNaotoHoriguchi2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21252On the Rseries extraction techniques for sub-22nm CMOS Finfet and SiGe technologiesProceedings paper