Conard, ThierryThierryConardPetry, JasmineJasminePetryRichard, OlivierOlivierRichardVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6140TOFSIMS investigation of ZrAlO oxide layersOral presentation