Methodologies for sub-1nm EOT TDDB evaluatiion

Kauerauf, ThomasThomasKaueraufDegraeve, RobinRobinDegraeveRagnarsson, Lars-AkeLars-AkeRagnarssonRoussel, PhilippePhilippeRousselSahhaf, SaharSaharSahhafGroeseneken, GuidoGuidoGroesenekenO'Connor, RobertRobertO'Connor2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19164Methodologies for sub-1nm EOT TDDB evaluatiionProceedings paper