Front-side Integration of Middle-of-line Stacked Contacts for Monolithic CFET

Vega Gonzalez, VictorVictorVega GonzalezStiers, KarenKarenStiersSheng, C.C.ShengDemuynck, StevenStevenDemuynckToledo de Carvalho Cavalcante, CamilaCamilaToledo de Carvalho CavalcantePetersen Barbosa Lima, LucasLucasPetersen Barbosa LimaChiarella, ThomasThomasChiarellaBoemmels, JuergenJuergenBoemmelsSarkar T.Franchina Vergel, NathaliNathaliFranchina VergelRadisic, DunjaDunjaRadisicLoo, RogerRogerLooRosseel, ErikErikRosseelPorret, ClémentClémentPorretMannaert, GeertGeertMannaertChoudhury, SubhobrotoSubhobrotoChoudhuryBrissonneau, VincentVincentBrissonneauDupuy, EmmanuelEmmanuelDupuyPeter, AntonyAntonyPeterJourdan, NicolasNicolasJourdanSoulie, J. P.J. P.SoulieNakamata, T.T.NakamataRomo Negreira, AinhAinhRomo NegreiraClark, R.R.ClarkVandersmissen, KevinKevinVandersmissenSebaai, FaridFaridSebaaiPuttarame Gowda, PallaviPallaviPuttarame GowdaLai, J. G.J. G.LaiMingardi, AndreaAndreaMingardiSarkar, Sujan KumarSujan KumarSarkarChan, BTBTChanSepulveda Marquez, AlfonsoAlfonsoSepulveda MarquezLanger, RobertRobertLangerKoo, Il GyoIl GyoKooAltamirano Sanchez, EfrainEfrainAltamirano SanchezDevriendt, KatiaKatiaDevriendtRincon Delgadillo, PaulinaPaulinaRincon DelgadilloLazzarino, FredericFredericLazzarinoMitard, JeromeJeromeMitardGeypen, JefJefGeypenBatuk, DmitryDmitryBatukChen, Yi-FanYi-FanChenVerbeeck, F.F.VerbeeckHolsteyns, FrankFrankHolsteynsSubramanian, S.S.SubramanianTokei, ZsoltZsoltTokeiHoriguchi, NaotoNaotoHoriguchiBiesemans, SergeSergeBiesemans2025-03-062025-03-062024979-8-3503-8518-22380-632XWOS:001411360600010https://imec-publications.be/handle/20.500.12860/45344Front-side Integration of Middle-of-line Stacked Contacts for Monolithic CFETProceedings paper10.1109/IITC61274.2024.10732165979-8-3503-8517-5WOS:001411360600010