O'Sullivan, BarryBarryO'SullivanThoan, N.H.N.H.ThoanJivanescu, M.M.JivanescuPantisano, LuigiLuigiPantisanoBearda, TwanTwanBeardaDross, FredericFredericDrossGordon, IvanIvanGordonAfanasiev, ValeriValeriAfanasievStesmans, AndreAndreStesmansPoortmans, JefJefPoortmans2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21239Atomic and electrical characterisation of amorphous silicon passivation layersProceedings paper