Stassen, AndimAndimStassenFiorentino, GiuseppeGiuseppeFiorentinoJones, BenBenJonesStahl, RichardRichardStahlDupont, TaniaTaniaDupontVrancken, EviEviVranckenHumbert, AurelieAurelieHumbertSeveri, SimoneSimoneSeveriWood, AlexAlexWoodWorster, WillWillWorsterRiddell, KevinKevinRiddellAshraf, HumaHumaAshrafThomas, DaveDaveThomas2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29496Microfluidics on 200mm quartz substrate using semiconductor fab dry etch process as an enabler for imaging applications in life sciencesMeeting abstract