Wu, ChenChenWuLi, YunlongYunlongLiBaklanov, MikhaïlMikhaïlBaklanovCroes, KristofKristofCroes2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27600Electrical reliability challenges of advanced low-k dielectricsBook chapterhttp://www.worldscientific.com/doi/abs/10.1142/9789814740487_0005