Krishtab, MikhailMikhailKrishtabAfanasiev, ValeriValeriAfanasievStesmans, AndreAndreStesmansDe Gendt, StefanStefanDe GendtBaklanov, MikhaïlMikhaïlBaklanov2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25490Impact of template residues on electrical properties of spin-on ultra low-k dielectricsMeeting abstracthttp://www.ieeesisc.org/programs/2015_SISC_technical_program.pdf