Lanthanide-assisted deposition of strongly electro-optic PZT thin films on silicon: towards integrated active nanophotonic devices

George, J.PJ.PGeorgeSmet, P.F.P.F.SmetBotterman, J.J.BottermanBliznuk, V.V.BliznukWoestenborghs, WouterWouterWoestenborghsVan Thourhout, DriesDriesVan ThourhoutNeyts, K.K.NeytsBeeckman, J.J.Beeckman2021-10-222021-10-222015-061944-8244https://imec-publications.be/handle/20.500.12860/25309Lanthanide-assisted deposition of strongly electro-optic PZT thin films on silicon: towards integrated active nanophotonic devicesJournal articlehttp://pubs.acs.org/doi/abs/10.1021/acsami.5b01781