Beernaert, RoelRoelBeernaertPodprocky, TomasTomasPodprockyDe Coster, JeroenJeroenDe CosterWitvrouw, AnnAnnWitvrouwHaspeslagh, LucLucHaspeslaghAvci, AykutAykutAvciDe Smet, JelleJelleDe SmetDe Smet, HerbertHerbertDe Smet2021-10-182021-10-1820100167-9317https://imec-publications.be/handle/20.500.12860/16723Novel micromirror design with variable pull-in voltageJournal article