Sputtering with large On+ cluster projectiles on inorganic surfaces

Fleischmann, ClaudiaClaudiaFleischmannConard, ThierryThierryConardFranquet, AlexisAlexisFranquetNiehuis, EwaldEwaldNiehuisRading, DerkDerkRadingMoellers, RudolfRudolfMoellersPoleunis, ClaudeClaudePoleunisDelcorte, ArnaudArnaudDelcorteVandervorst, WilfriedWilfriedVandervorst2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25276Sputtering with large On+ cluster projectiles on inorganic surfacesMeeting abstract