In-line wafer-level monitoring of the strain gradient in MEMS structural layers using an optical interferometer

Varela Pedreira, OlallaOlallaVarela PedreiraDe Coster, JeroenJeroenDe CosterSeveri, SimoneSimoneSeveriDe Wolf, IngridIngridDe Wolf2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21754In-line wafer-level monitoring of the strain gradient in MEMS structural layers using an optical interferometerOral presentation