Simulation of mechanical stresses during shallow trench isolation process

Poncet, A.A.PoncetBolt, M.M.BoltBarla, K.K.BarlaDe Wolf, IngridIngridDe Wolf2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2871Simulation of mechanical stresses during shallow trench isolation processProceedings paper