Vanstreels, KrisKrisVanstreelsBrongersma, SywertSywertBrongersmaTokei, ZsoltZsoltTokeiCarbonell, LaureLaureCarbonellDe Ceuninck, WardWardDe CeuninckD'Haen, JanJanD'HaenD'Olieslaeger, MarcMarcD'Olieslaeger2021-10-172021-10-1720080884-2914https://imec-publications.be/handle/20.500.12860/14725Increasing the mean grain size in copper films and featuresJournal article