Tuning ion-solid interactions for compositional depth profiling: Secondary Ion Mass Spectrometry

Pureti, RathaiahRathaiahPureti2021-10-232021-10-232016-08https://imec-publications.be/handle/20.500.12860/27170Tuning ion-solid interactions for compositional depth profiling: Secondary Ion Mass SpectrometryPHD thesishttps://limo.libis.be/primo-explore/fulldisplay?docid=LIRIAS1762257&context=L&vid=Lirias&search_scope=Lirias&tab=default_tab&lang=en_US&fromSitemap=1