Shamiryan, DenisDenisShamiryanDanilkin, EvgenyEvgenyDanilkinTinck, StefanStefanTinckKlick, MichaelMichaelKlickMilenin, AlexeyAlexeyMileninBaklanov, MikhaïlMikhaïlBaklanovBoullart, WernerWernerBoullart2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17973Influence of the top chamber window temperature on the STI etch processProceedings paper