Eyben, PierrePierreEybenVandervorst, WilfriedWilfriedVandervorstAlvarez, DavidDavidAlvarezXu, MingweiMingweiXuFouchier, MarcMarcFouchier2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12141Probing semiconductor technology and devices with scanning spreading resistance microscopyBook chapter