In-situ studies of point defect reactions in silicon by high flux electron iIrradiation in a high voltage transmission electron microscope

Fedina, L.L.FedinaVan Landuyt, J.J.Van LanduytVanhellemont, JanJanVanhellemontRomano, AlbertAlbertRomanoAseev, A.A.Aseev2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/154In-situ studies of point defect reactions in silicon by high flux electron iIrradiation in a high voltage transmission electron microscopeProceedings paper