Metrology for the next generation of semiconductor devices

Orji, N.G.N.G.OrjiBadaroglu, M.M.BadarogluBarnes, B.M.B.M.BarnesBeitia, C.C.BeitiaBunday, B.D.B.D.BundayCelano, UmbertoUmbertoCelanoKline, R.J.R.J.KlineNeisser, M.M.NeisserObeng, Y.Y.ObengVladar, A.E.A.E.Vladar2021-10-262021-10-2620182520-1131https://imec-publications.be/handle/20.500.12860/31454Metrology for the next generation of semiconductor devicesJournal articlehttps://doi.org/10.1038/s41928-018-0150-9